Multi channel detector, optics therefor and method of operating thereof

A charged particle beam device, comprising:

• a charged particle beam source for providing a primary charged particle beam;
• a first focusing element for focusing the primary charged particle beam on the specimen, wherein a signal beam is generated;
• and
• a charged particle detection device for detection of a signal beam, the detection devices comprises:
• a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap;
• a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, configured for focusing the first portion of the signal beam, and configured for deflecting and focusing the at least one second portion of the signal beam, wherein the particle optics comprises:
• a first electrode;
• and
• at least one second electrode,
• wherein the first electrode is an inner electrode and the at least one second electrode is provided radially outward of the first electrode.

A charged particle multi-beam device comprising:

• at least two charged particle beam devices, wherein each charged particle beam device comprises:
• a charged particle beam source for providing a primary charged particle beam;
• a first focusing element for focusing the primary charged particle beam on the specimen, wherein a signal beam is generated;
• and
• a charged particle detection device for detection of a signal beam, the detection devices comprises:
• a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap;
• a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, configured for focusing the first portion of the signal beam, and configured for deflecting and focusing the at least one second portion of the signal beam, wherein the particle optics comprises:
• a first electrode;
• and
• at least one second electrode,
• wherein the first electrode is an inner electrode and the at least one second electrode is provided radially outward of the first electrode.