Drawing apparatus, method of manufacturing article, and information processing apparatus
AssigneeCanon Kabushiki Kaisha
InventorsShinji Ohishi, Tomoyuki Morita
Life of this patent
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Abstract
The present invention provides a drawing apparatus including a plurality of drawing units each of which is configured to perform drawing on a substrate with a charged particle beam, a plurality of first processors configured to be selectively connectable to each of the plurality of drawing units, an information processor configured to determine, from the plurality of first processors, a first processor to be connected to a first drawing unit among the plurality of drawing units, based on drawing data, and a connection unit configured to connect the determined first processor to the first drawing unit.
Claims8
A drawing apparatus including a plurality of drawing units each of which is configured to perform drawing on a substrate with a charged particle beam, the apparatus comprising:
- a plurality of first processors configured to be selectively connectable to each of the plurality of drawing units;
- an information processor configured to determine, from the plurality of first processors, a first processor to be connected to a first drawing unit among the plurality of drawing units, based on drawing data;
- and
- a connection unit configured to connect the determined first processor to the first drawing unit.
A method of manufacturing an article, the method comprising:
- performing drawing on a substrate using a drawing apparatus;
- developing the substrate on which the drawing has been performed;
- and
- processing the developed substrate to manufacture the article,
- wherein the drawing apparatus includes a plurality of drawing units each of which is configured to perform drawing on a substrate with a charged particle beam, the apparatus including:
- a plurality of first processors configured to be selectively connectable to each of the plurality of drawing units;
- an information processor configured to determine, from the plurality of first processors, a first processor to be connected to a first drawing unit among the plurality of drawing units, based on drawing data;
- and
- a connection unit configured to connect the determined first processor to the first drawing unit.
An information processing apparatus connected to a drawing apparatus including a plurality of drawing units each of which is configured to perform drawing on a substrate with a charged particle beam, the drawing apparatus including a plurality of first processors configured to be selectively connectable to each of the plurality of drawing units, and a connection unit configured to connect one of the plurality of first processors to one of the plurality of drawing units, wherein the information processing apparatus is configured to
- determine, from the plurality of first processors, a first processor to be connected to a first drawing unit among the plurality of drawing units, based on drawing data, and
- control the connection unit so that the determined first processor is connected to the first drawing unit.
Dependencies are inferred from the claim text.