Method for producing a scintillator and scintillator
AssigneeSiemens Aktiengesellschaft
InventorsPeter Hackenschmied, Stefan Wirth
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Abstract
A method is disclosed, in at least one embodiment, for producing a scintillator for a radiation detector, in which the scintillator is produced in layers by depositing a scintillator material using a PVD process. By using a PVD process, owing to lower process temperatures of less than 300° C., it is possible to produce scintillators with decay times of less than 1.1 ns over large surfaces. In this way, the prerequisites for quantitative and energy-selective detection of individual radiation quanta can be satisfied even with fluxes of more than 108 X-ray quanta/mm2*s. At least one embodiment of the invention also relates to a scintillator produced by such a method.
Claims17
A method for producing a scintillator for a radiation detector, the method comprising:
- producing the scintillator in layers by depositing a scintillator material using a PVD process, wherein the scintillator material is deposited directly on a photodiode or a photodiode array as a substrate.
A scintillator for a radiation detector comprising a scintillator material arranged directly on a photodiode or a photodiode array as a substrate, wherein the scintillator is produced from a scintillator material deposited in layers using a PVD process.
Dependencies are inferred from the claim text.