Optical filter having substrate including surfaces with different heights and optical module provided with same
AssigneeSeiko Epson Corporation
InventorTsukasa Funasaka
Life of this patent
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Abstract
An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The second substrate faces the first substrate. The second substrate includes a first surface and a second surface. The second surface surrounds the first surface in a plan view and a second height of the second surface is lower than a first height of the first surface. The first mirror is formed on the first surface of the second substrate. The second mirror is formed on the first substrate, the second mirror facing the first mirror. The first electrode is formed on the first substrate. The second electrode is formed on the second surface of the second substrate. The second electrode faces the first electrode.
Claims5
An optical filter comprising:
- a first substrate;
- a second substrate facing the first substrate, the second substrate including a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in the plan view, a first height of the first surface being lower than a second height of the second surface, a third height of the third surface being lower than the first height of the first surface;
- a first mirror formed on the first surface of the second substrate;
- a second mirror formed on the first substrate, the second mirror facing the first mirror;
- a first electrode formed on the first substrate;
- and
- a second electrode formed on the third surface of the second substrate, the second electrode facing the first electrode.
Dependencies are inferred from the claim text.