Back to results
US 8,618,183 B2Granted
Materials containing voids with void size controlled on the nanometer scale
AssigneeInternational Business Machines Corporation
InventorsStephen M. Gates, Alfred Grill, Deborah A. Neumayer, Son Nguyen, Vishnubhai V. Patel
Life of this patent
Estimating the term…
Abstract
A method of forming a porous composite material in which substantially all of the pores within the composite material are small having a diameter of about 5 nm or less and with a narrow PSD is provided. The porous composite material includes a first solid phase having a first characteristic dimension and a second phase comprised of pores having a second characteristic dimension, wherein the characteristic dimensions of at least one of said phases is controlled to a value of about 5 nm or less.
Claims16
A method comprising:
- providing a single precursor selected from the group consisting of an alkoxysilane containing one C═C double bond into a reactor, wherein said one C═C double bond is a built-in porogen;
- depositing a dielectric film from said single precursor in the presence of at least CO;
- and
- removing said built-in porogen from said dielectric film to provide a porous dielectric material comprising a first phase and a second phase comprised of pores, wherein said pores have a diameter of about 5 nm or less, a pore size distribution having a maximum that is less than about 1 nm, a full width at half maximum in the pore size distribution ranging from 1 to 3 nm, and with a fraction less than 0.1 of pores having a pore size of greater than about 1 nm.
1 more element
A method comprising:
- providing a single precursor selected from the group consisting of an alkoxysilane containing one C═C double bond into a reactor, wherein said one C═C double bond is a built-in porogen;
- depositing a dielectric film from said single precursor in the presence of at least N2;
- and
- removing said built-in porogen from said dielectric film to provide a porous dielectric material comprising a first phase and a second phase comprised of pores, wherein said pores have a diameter of about 5 nm or less, a pore size distribution having a maximum that is less than about 1 nm, a full width at half maximum in the pore size distribution ranging from 1 to 3 nm, and with a fraction less than 0.1 of pores having a pore size of greater than about 1 nm.
1 more element
Dependencies are inferred from the claim text.