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US 8,617,990 B2Granted
Reduced PTH pad for enabling core routing and substrate layer count reduction
AssigneeIntel Corporation
InventorsDebendra Mallik, Mihir K. Roy
Life of this patent
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Abstract
Embodiments are directed to semiconductor packaging having reduced sized plated through hole (PTH) pads by eliminating the margin of the pad-to-PTH alignment and enabling finer traces on the core of the substrate.
Claims5
A method, comprising:
- providing a substrate core having a resin rich outer layer;
- providing a copper foil over the resin rich outer layer;
- etching the copper foil to reduce its thickness;
- laser drilling the substrate core to create through holes to provide vertical paths through the core;
- providing a layer of copper plating;
- patterning the copper plating using a dry film resist to form trenches for forming trace lines and vias;
- filling with electrolytic copper to simultaneously fill the trace lines and vias and through holes to form plated through holes (PTHs), wherein the PTHs having a diameter of approximately 100 μm at a top and bottom side of the core and 60-90 μm at a center portion providing the hour glass shape;
- and
- proceeding to form dielectric build-up layers.
6 more elements
Dependencies are inferred from the claim text.