Apparatus and method of forming high crystalline quality layer

A method of reducing crystalline defects within an internal region of a silicon carbide wide bandgap semiconductor to form a high crystalline quality internal region comprising:

• providing a silicon carbide material having crystalline vacancies containing nitrogen impurity defined between a first outer surface and a second inner substrate surface;
• irradiating the first outer surface of the silicon carbide wide bandgap semiconductor with an ultraviolet laser to effuse nitrogen from vacancies in the silicon carbide wide bandgap semiconductor;
• applying a doping gas having a carbon-hydrogen (C—H) bond;
• and
• continuing irradiation by the ultraviolet laser for photolytically decomposing carbon-hydrogen (C—H) bond to produce free carbon atoms from the doping gas to diffuse the carbon atoms into the vacancies in the silicon carbide wide bandgap semiconductor;
• further irradiating the silicon carbide wide bandgap semiconductor to anneal the silicon carbide wide bandgap semiconductor to remove dislocations, stacking faults and micropipes;
• and
• continuing irradiating the silicon carbide wide bandgap semiconductor to create a continuous or diffuse boundary to prevent the re-introduction of mobile defects.