Methods of forming diodes
AssigneeMicron Technology, Inc.
InventorsGurtej Sandhu, Bhaskar Srinivasan
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AssigneeMicron Technology, Inc.
InventorsGurtej Sandhu, Bhaskar Srinivasan
Estimating the term…
Some embodiments include methods of forming diodes. A stack may be formed over a first conductive material. The stack may include, in ascending order, a sacrificial material, at least one dielectric material, and a second conductive material. Spacers may be formed along opposing sidewalls of the stack, and then an entirety of the sacrificial material may be removed to leave a gap between the first conductive material and the at least one dielectric material. In some embodiments of forming diodes, a layer may be formed over a first conductive material, with the layer containing supports interspersed in sacrificial material. At least one dielectric material may be formed over the layer, and a second conductive material may be formed over the at least one dielectric material. An entirety of the sacrificial material may then be removed.
A method of forming a plurality of diodes, comprising:
A method of forming a plurality of diodes, comprising:
A method of forming a plurality of diodes, comprising:
A method of forming a plurality of diodes, comprising:
Dependencies are inferred from the claim text.