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US 8,617,938 B2Granted
Device and method for boron diffusion in semiconductors
AssigneeInternational Business Machines Corporation
InventorsJoel P. De Souza, Marinus Hopstaken, Jeehwan Kim, Devendra K. Sadana
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Abstract
A device and method for semiconductor fabrication includes forming a buffer layer on a semiconductor substrate and depositing an amorphous elemental layer on the buffer layer. Elements of the elemental layer are diffused through the buffer layer and into the semiconductor layer.
Claims25
A method for semiconductor fabrication, comprising:
- forming a buffer layer on a semiconductor layer;
- depositing an amorphous or polycrystalline elemental layer on the buffer layer;
- and
- diffusing elements of the elemental layer through the buffer layer and into the semiconductor layer, wherein said elements are diffused through material forming the buffer layer and thereby reach and diffuse through the semiconductor layer.
1 more element
A method for semiconductor fabrication, comprising:
- forming a silicon oxide layer on a silicon substrate;
- depositing an elemental Boron layer on the silicon oxide layer;
- and
- diffusing elements of the Boron layer through the silicon oxide layer and into the silicon substrate, wherein said elements are diffused through material forming the silicon oxide layer and thereby reach and diffuse through the silicon substrate.
1 more element
A semiconductor device, comprising:
- a silicon substrate;
- a silicon oxide buffer layer that is above the silicon substrate;
- and
- a doped region formed in the substrate, the doped region containing Boron atoms diffused into the doped region through the buffer layer formed on the substrate, wherein the doped region is totally free of a Boron-Rich Layer material and wherein a concentration of Boron in the buffer layer at an interface between material forming the buffer layer and the doped region of the substrate is greater than a concentration of Boron in the doped region at the interface.
1 more element
Dependencies are inferred from the claim text.