Semiconductor device manufacturing apparatus and method for manufacturing semiconductor device

A method of manufacturing a semiconductor device, the method comprising:

• preparing first and second semiconductor chips, the first semiconductor chip including a first electrode on a first surface, and the second semiconductor chip including a second electrode on a second surface and a third electrode on a third surface that is opposite to the second surface, the third electrode being overlapped to the second electrode, the second surface including an electrode-free region that is free of any electrode;
• applying a sealing resin on the first surface of the first semiconductor chip;
• holding the second surface of the second semiconductor chip by a bonding tool including a pressing surface and a supporting-portion projected from the pressing surface, the pressing surface being in contact with the second electrode, the supporting-portion being arranged at a position facing the electrode-free region;
• stacking the second semiconductor chip over the first semiconductor chip by the bonding tool so as to electrically connect the third electrode to the first electrode, the sealing resin being filled in a space between the first and second semiconductor chips;
• and
• hardening the sealing resin after stacking the second semiconductor chip on the first semiconductor chip, the first semiconductor chip, the second semiconductor chip and the sealing resin being constructed a stacked structure.