Annealing thin films
AssigneeInternational Business Machines Corporation
InventorsSupratik Guha, David B. Mitzi, Teodor K. Todorov, Kejia Wang
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AssigneeInternational Business Machines Corporation
InventorsSupratik Guha, David B. Mitzi, Teodor K. Todorov, Kejia Wang
Estimating the term…
In an annealing process, a Kesterite film is provided on a substrate. The Kesterite film and the substrate are generally planar, have an interface, and have a substrate exterior side and a Kesterite exterior side. An additional step includes locating the cap adjacent the Kesterite exterior side. A further step includes applying sufficient heat to the Kesterite film and the substrate for a sufficient time to anneal the Kesterite film. The annealing is carried out with the cap adjacent the Kesterite exterior side. In another aspect, the film is not limited to Kesterite, and the cap is employed without any precursor layer thereon. Solar cell manufacturing techniques employing the annealing techniques are also disclosed.
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Dependencies are inferred from the claim text.