Method for producing a substrate including a step of thinning with stop when a porous zone is detected
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsFrederic-Xavier Gaillard, Fabrice Nemouchi
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Abstract
A method for producing a substrate, the method including: forming a porous zone in an inner layer of the substrate; progressively thinning a thickness of the substrate towards the inner layer including the porous zone; completing the progressively thinning by polishing; and controlled stopping of the polishing by detecting the porous zone during the polishing, the detecting including measuring at least one measurable physical parameter admitting a significant variation during a transition between two layers.
Claims23
A method for producing a substrate, said method comprising:
- forming a porous zone in an inner layer of the substrate;
- progressively thinning a thickness of the substrate towards the inner layer including the porous zone;
- completing the progressively thinning by polishing;
- and
- controlled stopping of the polishing by detecting a transition from a non-porous zone of the substrate to the porous zone during the polishing, the detecting including measuring at least one measurable physical parameter admitting a significant variation that indicates the transition from the non-porous zone of the substrate to the porous zone.
Dependencies are inferred from the claim text.