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US 8,617,905 B2Granted
Thermal microvalves
AssigneeThe Regents of the University of Michigan
InventorsMark A. Burns, Brian N. Johnson, Michael Chen
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Abstract
The movement and mixing of microdroplets through microchannels is described employing silicon-based microscale devices, comprising microdroplet transport channels, reaction regions, electrophoresis modules, and radiation detectors. The discrete droplets are differentially heated and propelled through etched channels. Electronic components are fabricated on the same substrate material, allowing sensors and controlling circuitry to be incorporated in the same device.
Claims13
A method, comprising:
- a) providing a channel defined within a generally planar substrate and having a liquid barrier, said barrier comprising a first silicon oxide layer, a silicon nitride layer, and a second silicon oxide layer, wherein said channel allows for movement of at least one liquid;
- b) heating a mass of meltable material disposed adjacent to said channel within said substrate;
- and
- c) moving said heated mass of meltable material into said channel, wherein said mass of meltable material is at least partially liquified.
1 more element
A method, comprising:
- a) merging a first liquid and a second liquid within a channel defined within a generally planar substrate, said channel comprising a liquid barrier, wherein said barrier comprises a first silicon oxide layer, a silicon nitride layer, and a second silicon oxide layer;
- b) heating a mass of meltable material disposed adjacent to said channel within said substrate;
- and
- c) moving said heated mass of meltable material into said channel, wherein said mass of meltable material is at least partially liquified.
1 more element
Dependencies are inferred from the claim text.