Photoresist composition and method for producing photoresist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsKoji Ichikawa, Yukako Anryu, Shingo Fujita
Life of this patent
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Abstract
A photoresist composition comprising (A) a resin which has an acid-labile group-containing structural unit and a lactone ring-containing structural unit, and (B) a salt represented by formula (I): wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, n represents 0 or 1, L1 represents a single bond or a C1-C10 alkanediyl group in which a methylene group may be replaced by an oxygen atom or a carbonyl group, provided that L1 is not a single bond when n is 0, R1 represents a hydroxy group or a hydroxy group protected by a protecting group, and Z+ represents an organic cation.
Claims12
A photoresist composition comprising
- (A) a resin which has an acid-labile group-containing structural unit and a lactone ring-containing structural unit, and (B) a salt represented by formula (I):
- wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group,
- n represents 0 or 1,
- L1 represents a single bond or a C1-C10 alkanediyl group in which a methylene group may be replaced by an oxygen atom or a carbonyl group, provided that L1 is not a single bond when n is 0,
- R1 represents a hydroxy group protected by a protecting group, and
- Z+ represents an organic cation,
- said hydroxy group protected by a protecting group being represented by formula (2A):
- wherein Ra61′ and Ra62′ independently each represent a hydrogen atom or a C 1-C12 monovalent hydrocarbon group, and Ra63′ represents a C1-C20 monovalent hydrocarbon group, or
- Ra63 ′ represents a C2-C20 divalent hydrocarbon group together with Ra62′, and
- a methylene group of the monovalent hydrocarbon groups may be replaced by an oxygen atom or a sulfur atom, and a methylene group of the divalent hydrocarbon groups may be replaced by an oxygen atom or a sulfur atom, and * represents a binding position.
Dependencies are inferred from the claim text.