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US 8,617,672 B2Granted
Localized surface annealing of components for substrate processing chambers
AssigneeApplied Materials, Inc.
InventorsAshish Bhatnagar, Laxman Murugesh, Padma Gopalakrishnan
Life of this patent
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Abstract
A substrate processing chamber component has a structural body with localized surface regions having annealed microcracks. The annealed microcracks reduce crack propagation and increase fracture resistance. In one method of manufacture, the structural body of the component is formed, and a laser beam is directed onto localized surface regions of the body for a sufficient time to anneal the surface microcracks.
Claims32
A substrate processing chamber component comprising:
- (a) a processing chamber component structural body comprising a substrate support, gas distributor, gas energizer, collar, ring, shield, ceiling, wall, or liner;
- and
- (b) localized surface regions on the structural body, the localized surface regions comprising (i) annealed microcracks having crack surfaces that are in contact with one another, and (ii) a mean Vickers hardness that is at least about 10% higher than the Vickers hardness of the untreated structural body.
A substrate processing chamber component comprising:
- a processing chamber component structural body having a shape that is adapated for use in a substrate processing chamber and localized surface regions comprising (i) annealed microcracks that are healed and closed off such that the crack surfaces of the annealed microcracks are in contact across the entire microcrack plane, and (ii) a mean Vickers hardness that is at least about 10% higher than the Vickers hardness of the untreated structural body.
A substrate processing chamber component comprising:
- a processing chamber component structural body having a shape that is adapted for use in a substrate processing chamber and localized surface regions (i) consisting essentially of annealed microcracks that are healed and closed off by themselves, and wherein the crack surfaces of teh annealed microtracks are in contact across the entire microtrack plane, and (ii) having a mean Vickers hardness that is at least about 10% higher than the Vickers hardness of the untreated surface.
Dependencies are inferred from the claim text.