Laser formation of graphene
AssigneePartial Assignment to University of Central Florida
InventorsNathaniel R. Quick, Aravinda Kar
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Abstract
An apparatus and method is disclosed for synthesizing graphene comprising the steps of providing a substrate and focusing a laser beam in the presence of a carbon doping gas to induce photolytic decomposition of the gas to atomic carbon. The carbon is photolytically reacted with the substrate to grow graphene.
Claims9
A method for synthesizing graphene, comprising the steps of:
- providing a substrate;
- focusing a laser beam in the presence of a carbon doping gas to induce two photon photolytic decomposition of the carbon doping gas only near the gas-substrate surface interface at the laser focal point to produce a plane of atomic carbon with carbon-carbon bonds in a hexagonal array;
- and
- continuing focusing the laser beam to photolytically react the carbon with the substrate to grow graphene.
A method for synthesizing graphene, comprising the steps of:
- providing a silicon substrate;
- focusing a laser beam in the presence of a carbon doping gas to induce two photon photolytic decomposition of the carbon doping gas only near the gas-silicon substrate surface interface at the laser focal point to produce a plane of atomic carbon with carbon-carbon bonds in a hexagonal array;
- and
- continuing focusing the laser beam to photolytically react the carbon with the silicon substrate to grow graphene.
A method of forming graphene, comprising the steps of providing a silicon carbide substrate transparent to 532 nm wavelength;
- immersing a top surface of the silicon carbide substrate in carbon containing doping gas;
- and
- focusing a 532 nm laser from a bottom surface to the top surface of the silicon carbide substrate to photolytically decompose the carbon on the top surface of the silicon carbide substrate growing graphene on the top surface of the silicon carbide substrate.
A method of forming graphene, comprising the steps of:
- providing a wide bandgap substrate transparent to 532 nm wavelength;
- immersing a top surface of the wide bandgap substrate in carbon containing doping gas;
- and
- focusing a 532 nm laser from a bottom surface to the top surface of the wide bandgap substrate to photolytically decompose the carbon on the top surface of the wide bandgap substrate growing graphene on the top surface of the wide bandgap substrate.
Dependencies are inferred from the claim text.