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US 8,617,650 B2Granted
Synthesis of aligned carbon nanotubes on double-sided metallic substrate by chemical vapor depositon
AssigneeThe Hong Kong University of Science and Technology
InventorsHuan Wang, Ka Ming Ng, Xijun Hu, Jiyun Feng
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Abstract
Aligned multi-walled carbon nanotubes were grown on both sides of a metallic or metal-coated substrate by water vapor-assisted chemical vapor deposition. Aligned carbon nanotube films of thickness ranging from 1 μm to over 100 μm were obtained. By manipulating various operating factors—position of substrate in the reactor, amount of water vapor, amount of catalyst, reactor temperature, and growth time, the morphology and thickness of these carbon nanotube films could be adjusted.
Claims25
A process for synthesis of aligned carbon nanotubes, comprising:
- sputtering a thin layer of chromium and gold on a first and a second side of a double-sided substrate;
- synthesizing aligned carbon nanotubes on first and second sides of said metallic double sided substrate by applying catalytic pyrolysis of a hydrocarbon gas in the presence of a catalyst comprising ferrocene at about 725° C.˜800° C. with the presence of water in a chemical vapor deposition (CVD) process.
Dependencies are inferred from the claim text.