Conductive film removal agent and conductive film removal method
AssigneeToray Industries, Inc.
InventorsHiroki Sekiguchi, Junji Mata
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Abstract
Disclosed is an agent for removing a conductive film, which contains: an acid having a boiling point of 80° C. or higher, a base having a boiling point of 80° C. or higher, or a compound which generates an acid or a base by external energy in combination with a solvent, a resin, and a leveling agent. Also disclosed is a method for removing a conducting film, which uses the agent for removing a conductive film. The agent for removing a conductive film and the method for removing a conductive film are capable of in-place uniformity removing a desired portion of a conductive film.
Claims11
A conductive film removal agent comprising an acid having a boiling point of 80° C. or higher, or a base having a boiling point of 80° C. or higher, or a compound which generates an acid or a base by external energy in combination with a solvent, a resin containing a quaternary amino group in a part of the structure thereof, and a leveling agent, wherein the resin is a cationic resin.
Dependencies are inferred from the claim text.