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US 8,617,412 B2Granted
Nano-filter and method of forming same, and method of filtration
AssigneeInternational Business Machines Corporation
InventorsBrent A. Anderson, Andres Bryant, Edward J. Nowak, Jeffrey W. Sleight
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Abstract
The disclosure relates generally to nano-filters and methods of forming same, and methods of filtration. The nano-filter includes a substrate and at least one nanowire structure located between an inlet and an outlet. The nanowire structure may include a plurality of vertically stacked horizontal nanowires.
Claims5
A method of forming a nano-filter, the method comprising:
- forming at least one nanowire structure having a plurality of vertically stacked horizontal nanowires on a substrate, the forming of the at least one nanowire structure comprising:
- forming a plurality of layers of a first material and a plurality of layers of a second material on the substrate;
- masking and etching through the plurality of layers of the first material and the plurality of layers of the second material;
- and
- removing the plurality of layers of the second material selective to the first material so as to form the at least one nanowire structure having the plurality of vertically stacked horizontal nanowires;
- and
- depositing a capping layer on the at least one nanostructure so as to form the nano-filter.
4 more elements
Dependencies are inferred from the claim text.