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US 8,617,407 B2Granted
Systems and methods for electrical contacts to arrays of vertically aligned nanorods
AssigneePalo Alto Research Center Incorporated
InventorsThomas Hantschel, Noble M. Johnson, Peter Kiesel, Christian G. Van de Walle, William S. Wong
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Abstract
Systems and methods may provide electrical contacts to an array of substantially vertically aligned nanorods. The nanorod array may be fabricated on top of a conducting layer that serves as a bottom contact to the nanorods. A top metal contact may be applied to a plurality of nanorods of the nanorod array. The contacts may allow I/V (current/voltage) characteristics of the nanorods to be measured.
Claims9
A method of fabricating a nanorod device, comprising:
- forming a nanorod on a surface of a substrate, the nanorod extending in a direction non-parallel with the surface of the substrate, and the substrate being a growth substrate;
- depositing a first sacrificial layer to encapsulate the nanorod;
- removing a top thickness of the first sacrificial layer to expose a top of the nanorod;
- forming a first contact layer on the first sacrificial layer, the first contact layer being in electrical contact with the top of the nanorod;
- and
- metallizing the top of the nanorod so as to form a first metallized layer, the first metallized layer being formed on the first contact layer so as to form a first electrode;
- and
- removing remaining portions of the first sacrificial layer between the top and bottom of the nanorod to completely expose a central portion of the nanorod.
5 more elements
Dependencies are inferred from the claim text.