Method of fabricating organic light emitting display
AssigneeSamsung Display Co., Ltd.
InventorsJae-Ho Lee, Tae-Min Kang, Jin-Soo Kim, Seong-Taek Lee
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Abstract
Provided is a method of fabricating an organic light emitting display. The method includes forming an organic layer pattern on a substrate by irradiating a predetermined region of a donor substrate with a laser beam using a laser irradiation apparatus, the laser irradiation apparatus having a spatial light modulator (SLM). The spatial light modulator is used to form the organic layer pattern using the LITI method. Accordingly, it is possible to adjust various types of incident light to homogeneous and to have a desired profile. Therefore, there is provided a method of fabricating an organic light emitting display which is capable of forming an organic layer pattern without using a mask.
Claims14
A method of fabricating an organic light emitting display, comprising:
- providing a substrate having a pixel electrode formed thereon;
- laminating a donor substrate on an entire surface of the substrate;
- and
- forming an organic layer pattern on the substrate by irradiating a predetermined region of the donor substrate with a homogenous laser beam using a laser irradiation apparatus, the laser irradiation apparatus having a spatial light modulator (SLM) to provide the homogenous laser beam,
- wherein the SLM adjusts various types of incident light, using a reflection surface having a deformed shape, to output the homogeneous laser beam,
- wherein the SLM comprises a plurality of diffraction lattices formed in a pillar shape, the reflection surface being arranged between the plurality of diffraction lattices, and
- wherein a voltage applied to the diffraction lattices deforms the reflection surface so that a depth of the reflection surface from a surface of an adjacent diffraction lattice changes.
Dependencies are inferred from the claim text.