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US 8,616,865 B2Granted
Chemical liquid feeding device
AssigneeC & G Hi Tech Co., Ltd.
InventorsSa-Mun Hong, Hyung Il Kim
Life of this patent
Estimating the term…
Abstract
A chemical liquid feeding device for feeding chemical liquid used in a semiconductor fabrication process. The device includes three or more pumps arranged in a line. Each pump has different time points of suction stroke and discharge stroke so that the chemical liquid can be fed uniformly without pulsation.
Drawings
Claims14
A chemical liquid feeding device, comprising:
- three or more bellows pumps arranged in a line between an inlet end and an outlet end of a housing, the inlet end at a front of the housing and the outlet end at a rear of the housing, each of the pumps including a suction port and a discharge port, a capacity of each of the pumps increases from the inlet end to the outlet end such that the pumps have a substantially similar suction force, each pump having different time points of a suction stroke and a discharge stroke from one another;
- a suction pipe for integrally connecting the suction ports of the pumps;
- and
- a discharge pipe for integrally connecting the discharge ports of the pumps;
- wherein the suction ports and the discharge ports are arranged along a gravity direction such that chemical liquid within the pumps is discharged from the pumps by gravity.
2 more elements
A chemical liquid feeding device comprising:
- a housing including an inlet end and an outlet end opposite thereto;
- at least three bellows pumps linearly arranged between the inlet end and the outlet end, the pumps increasing in capacity from the inlet end to the outlet end, each one of the pumps including both a suction port and a discharge port, each pump having different time points of a suction stroke and a discharge stroke from one another, the pumps mounted to the housing such that gravity draws chemical liquid out from within the pumps;
- a suction pipe extending from the inlet end to each suction port;
- and
- a discharge pipe extending from the outlet end to each discharge port.
2 more elements
A chemical liquid feeding device comprising:
- a housing including an inlet end and an outlet end opposite thereto;
- at least three serially connected bellows pumps arranged linearly between the inlet end and the outlet end, the pumps increasing in capacity from the inlet end to the outlet end such that each pump has a substantially similar suction force, each one of the pumps including both a suction port and a discharge port, each pump having different time points of a suction stroke and a discharge stroke from one another, the pumps mounted to the housing such that gravity draws chemical liquid out from within the pumps;
- a suction pipe extending from the inlet end to each suction port;
- and
- a discharge pipe extending from the outlet end to each discharge port.
2 more elements
Dependencies are inferred from the claim text.