Liquid-ejecting head, liquid-ejecting apparatus, and piezoelectric element
AssigneeSeiko Epson Corporation
InventorsHiromu Miyazawa, Ichiro Asaoka
Life of this patent
Estimating the term…
Abstract
A liquid-ejecting head includes a pressure-generating chamber that communicates with a nozzle opening and a piezoelectric element. The piezoelectric element includes a first electrode; a piezoelectric body layer formed on the first electrode; and a second electrode formed on the piezoelectric body layer on a side opposite the first electrode. In the liquid-ejecting head, the piezoelectric body layer has a perovskite structure and an insulating property, and an A-site and an oxygen site of the perovskite structure respectively include a vacancy formed by losing an A-site metal and a vacancy formed by losing an oxygen atom, each of the vacancies including a hydrogen atom.
Claims11
A liquid-ejecting head comprising:
- a pressure-generating chamber that communicates with a nozzle opening;
- and
- a piezoelectric element including:
- a first electrode;
- a piezoelectric body layer formed on the first electrode, wherein:
- the piezoelectric body layer has a perovskite structure and an insulating property, and
- an A-site and an oxygen site of the perovskite structure respectively include a vacancy formed by losing an A-site metal and a vacancy formed by losing an oxygen atom, each of the vacancies including a hydrogen atom;
- and
- a second electrode formed on the piezoelectric body layer on a side opposite the first electrode.
A liquid-ejecting apparatus comprising:
- a liquid-ejecting head including:
- a pressure-generating chamber that communicates with a nozzle opening;
- and
- a piezoelectric element including:
- a first electrode;
- a piezoelectric body layer formed on the first electrode, wherein:
- the piezoelectric body layer has a perovskite structure and an insulating property, and
- an A-site and an oxygen site of the perovskite structure respectively include a vacancy formed by losing an A-site metal and a vacancy formed by losing and oxygen atom, each of the vacancies including a hydrogen atom;
- and
- a second electrode formed on the piezoelectric body layer on a side opposite the first electrode.
A piezoelectric element comprising:
- a first electrode;
- a piezoelectric body layer formed on the first electrode, wherein:
- the piezoelectric body layer has a perovskite structure and an insulating property;
- and
- an A-site and an oxygen site of the perovskite structure respectively include a vacancy formed by losing an A-site metal and a vacancy formed by losing an oxygen atom, each of the vacancies including a hydrogen atom;
- and
- a second electrode formed on the piezoelectric body layer on a side opposite the first electrode.
Dependencies are inferred from the claim text.