Force sensor with reduced noise
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsArnaud Walther, Guillaume Jourdan, Philippe Robert
Life of this patent
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Abstract
A MEMS or NEMS device for detecting a force following a given direction, comprising a support and at least one seismic mass capable of moving under the effect of the force to be measured in the direction of the force, and a detector for detecting the movement of the seismic mass, the seismic mass being articulated relative to the support by at least one pivot link, and an actuator capable of varying the distance between the axis of the pivot link and the center of gravity of the exertion of the force on the seismic mass.
Claims19
A microelectromechanical or nanoelec-tromechanical device for detecting a force following a given direction, comprising:
- a support,
- at least one seismic mass capable of moving under an effect of the force to be measured in the direction of said force, said mass comprising at least first part and second part able to move relative to each other,
- a detector for detecting the movement of said seismic mass, said seismic mass being articulated relative to the support by at least one pivot link, and
- an actuator capable of making a distance between an axis of the pivot link and the center of gravity of the exertion of the force on said seismic mass vary at high frequency, said actuator being capable of moving the second part of the seismic mass relative to the first part of the seismic mass in a direction different from that of the force to be measured, called excitation axis,
- wherein the device includes only one actuator for one seismic mass for the given direction of the force to be detected.
An accelerometer formed by a microelectromechanical or nanoelec-tromechanical device for detecting an acceleration force following a given direction, comprising:
- a support,
- at least one seismic mass capable of moving under an effect of the acceleration force to be measured in the direction of said acceleration force, said mass comprising at least first part and second part able to move relative to each other
- a detector for detecting the movement of said seismic mass, said seismic mass being articulated relative to the support by at least one pivot link, and
- an actuator capable of making a distance between an axis of the pivot link and the center of gravity of the exertion of the acceleration force on said seismic mass vary at high frequency, said actuator being capable of moving the second part of the seismic mass relative to the first part of the seismic mass in a direction different from that of the acceleration force, called excitation axis,
- wherein the accelerometer includes only one actuator for one seismic mass for the given direction of the force to be detected.
Dependencies are inferred from the claim text.