Angular rate sensor with suppressed linear acceleration response
OwnerMinyao Maoinventor
Life of this patent
Estimating the term…
Abstract
An angular rate sensor having two generally planar proof masses, a sense axis in the plane of the masses, and an input axis perpendicular to the sense axis. The masses are suspended from a driving frame, which is mounted for torsional movement about the input axis in drive-mode. And the masses are constrained for anti-phase movement along the sense axis in sense-mode in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the anti-phase movement of the masses along the sense axis for monitoring rate of rotation.
Claims16
A tri-axis angular rate sensor for detecting a rate of rotation about first, second, and third mutually perpendicular axes, comprising:
- A) a generally planar substrate in a plane which contains the first and second axes;
- B) a first subsensor disposed on the substrate for measuring a rate of rotation about the first, and third axes, the first subsensor comprising:
- a first driving frame mounted for rotation about a first driving axis which is parallel to the third axis;
- a first supporting frame disposed within the first driving frame, and the first supporting frame being suspended from the first driving frame for rotation about the second axis;
- first and second masses disposed within the first supporting frame and spaced apart along the first axis, the masses being suspended from the first supporting frame so that they rotate together with the first supporting frame and the first driving frame about the first driving axis in a drive-mode while permitting linear movement of the masses along the first axis in a sense-mode;
- a first detector for sensing the rotational movement of the first and second masses about the second axis in response to the rate of rotation about the first axis;
- a second detector for sensing the anti-phase movement of the first and second masses along the first axis in response to the rate of rotation about the third axis;
- C) a second subsensor disposed on the substrate for measuring a rate of rotation about the second axis, the second subsensor comprising:
- a second driving frame mounted for rotation about a second drive axis which is parallel to the third axis;
- at least one proof mass disposed within and suspended from the second driving frame for rotation about the first axis;
- a third detector for sensing the rotational movement of said at least one proof mass about the first axis in response to the rate of rotation about the second axis.
Dependencies are inferred from the claim text.