Hydrogen sensor
AssigneeInficon GmbH
InventorDaniel Wetzig
Life of this patent
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Abstract
A hydrogen sensor includes a housing, which is closed off by a membrane that is made of palladium and selectively only pervious to hydrogen. The housing is evacuated and contains a Pirani pressure sensor. The membrane and the Pirani pressure sensor are each attached to a carrier. Both carriers are joined directly next to one another or kept at a distance by a connection piece. The hydrogen sensor has a high sensitivity and a low response time due to the relatively large membrane surface and the low housing volume. It can be produced in a small size and integrated in the handle of a sniffer-type leak indicator.
Claims8
A hydrogen sensor comprising a pressure-tight pump-less housing closed off by a membrane of palladium, said membrane being arranged on a first carrier having a plurality of openings, and comprising a non gas consuming pressure sensor with a second carrier, wherein the first and the second carrier are one of joined directly to each other and spaced apart by a connection piece.
Dependencies are inferred from the claim text.