Methods and systems for controlling a semiconductor fabrication process
AssigneeBrooks Automation, Inc.
InventorsPatrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
Life of this patent
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Abstract
Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
Claims20
A method comprising:
- providing a semiconductor handling system including at least one robot and a plurality of process chambers;
- controlling the operation of the handling system with a software controller configured for employing a neural network and a finite state machine scheduler that provides controls signals to both of at least one of the at least one robot and the plurality of process chambers at least in part for effecting processing of at least one workpiece;
- and
- serially coupling the at least one robot, the plurality of process chambers, and the controller to each other in a daisy chain communicating relationship with an electronic interface including a shared medium.
A system comprising:
- a semiconductor handling system including at least one robot and a plurality of process chambers;
- a software controller that controls operation of the handling system, the controller being configured for employing a neural network and a finite state machine scheduler that provides controls signals to both of at least one of the at least one robot and the plurality of process chambers at least in part for effecting processing of at least one workpiece;
- and
- an electronic interface including a shared medium that serially couples the at least one robot, the plurality of process chambers, and the controller to each other in a daisy chain communicating relationship.
A semiconductor handling system comprising:
- at least one robot;
- a plurality of process chambers configured to form a vacuum wafer handling environment with the at least one robot;
- a software controller configured for employing a neural network and a finite state machine scheduler that provides controls signals to both of at least one of the at least one robot and the plurality of process chambers at least in part for effecting processing of at least one wafer by the at least one robot, the software controller comprising:
- the neural network;
- and
- a finite state machine;
- and
- an electronic interface including a shared medium for serially coupling the at least one robot, the plurality of process chambers, and the controller to each other in a daisy chain communicating relationship.
Dependencies are inferred from the claim text.