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US 8,609,317 B2Granted
Salt and photoresist composition containing the same
AssigneeSumitomo Chemical Company, Limited
InventorsKoji Ichikawa, Masako Sugihara, Yuko Yamashita
Life of this patent
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Abstract
A salt represented by the formula (I—Pb): wherein Xpb represents a single bond or —O—, Rpb represents a single bond etc., Ypb represents a polymerizable group, Zpb represents an organic group, Xpc represents a single bond or a C1-C4 alkylene group, and Rpc represents a C1-C10 aliphatic hydrocarbon group which can have one or more substituents etc.
Claims7
A salt represented by the formula (I—Pb):
- wherein Xpb represents a single bond or —O—,
- Rpb represents single bond, a C1-C10 divalent aliphatic hydrocarbon group, a C4-C36 divalent alicyclic hydrocarbon group or a C6-C36 divalent aromatic hydrocarbon group, and one or more methylene groups in the divalent aliphatic hydrocarbon group and the divalent alicyclic hydrocarbon group can be replaced by —O— or —CO—,
- Ypb represents a polymerizable group,
- Zpb+ represents a group represented by the formula (I—Pb-z2):
- wherein P22, P23 and P24 are independently in each occurrence substituents and any two of P22, P23 and P24 can be bonded each other to form a ring, x22 represents an integer of 0 to 5, x23 represents an integer of 0 to 4, and x24 represents an integer of 0 to 5,
- Xpc represents a single bond or a C1-C4 alkylene group, and
- Rpc represents a C1-C10 aliphatic hydrocarbon group which can have one or more substituents, a C4-C36 alicyclic hydrocarbon group which can have one or more substituents or a C6-C36 aromatic hydrocarbon group which can have one or more substituents, and one or more methylene groups in the divalent aliphatic hydrocarbon group and the divalent alicyclic hydrocarbon group can be replaced by —O— or —CO—.
4 more elements
A photoresist composition which comprises a polymer comprising a polymer comprising a structural unit derived from a salt represented by the formula (I—Pb):
- wherein Xpb represents a single bond or —O—,
- Rpb represents a single bond, a C1-C10 divalent aliphatic hydrocarbon group, a C4-C36 divalent alicyclic hydrocarbon group or a C6-C36 divalent aromatic hydrocarbon group, and one or more methylene groups in the divalent aliphatic hydrocarbon group and the divalent alicyclic hydrocarbon group can be replaced by —O— or —CO—,
- Ypb represents a polymerizable group,
- Zpb represents an organic group,
- Xpc represents a single bond or a C1-C4 alkylene group, and
- Rpc represents a C1-C10 aliphatic hydrocarbon group which can have one or more substituents, a C4-C36 alicyclic hydrocarbon group which can have one or more substituents or a C6-C36 aromatic hydrocarbon group which cart have one or more substituents, and one or more methylene groups in the divalent aliphatic hydrocarbon group and the divalent alicyclic hydrocarbon group can be replaced by —O— or —CO—, and an acid generator.
3 more elements
Dependencies are inferred from the claim text.