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US 8,608,885 B2Granted
Substrate heat treatment apparatus
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorsShigehiro Goto, Keiji Matsuchika, Akihiko Morita
Life of this patent
Estimating the term…
Abstract
A substrate heat treatment apparatus includes a heat-treating plate having a flat upper surface, support devices formed of a heat-resistant resin for contacting and supporting a substrate, a seal device disposed annularly for rendering gastight a space formed between the substrate and heat-treating plate, and exhaust bores for exhausting gas from the space. The support devices are formed of resin, and the upper surface of the heat-treating plate is made flat, whereby a reduced difference in the rate of heat transfer occurs between contact parts and non-contact parts on the surface of the substrate. Consequently, the substrate is heat-treated effectively while suppressing variations in heat history over the surface of the substrate.
Claims26
A substrate heat treatment apparatus for heat-treating a substrate, comprising:
- a heat-treating plate formed of metal and having a flat upper surface;
- support devices arranged on the upper surface of said heat-treating plate and formed entirely of a heat-resistant resin for contacting and supporting the substrate;
- wherein said support devices are projections formed on a sheet member for contacting the substrate;
- said sheet member being formed of heat-resistant resin and covering said flat upper surface of said heat-treating plate;
- a seal device disposed annularly on the upper surface of said heat-treating plate for contacting edges of the substrate to render gastight a space formed between the substrate and said heat-treating plate;
- and
- exhaust bores for exhausting gas from said space;
- said exhaust bores extending through said heat-treating plate from said upper surface to an opposite lower surface thereof;
- said heat-treating plate having a heating element mounted therein;
- said heat-treating plate having a metallic heat transfer portion disposed between said heating element and said upper surface of said heat-treating plate.
7 more elements
A substrate heat treatment apparatus for heat-treating a substrate, comprising:
- a heat-treating plate formed of metal and having a flat upper surface;
- support devices arranged on the upper surface of said heat-treating plate and formed entirely of a heat-resistant resin for contacting and supporting the substrate;
- a seal device disposed annularly on the upper surface of said heat-treating plate for contacting edges of the substrate to render gastight a space formed between the substrate and said heat-treating plate;
- and
- exhaust bores for exhausting gas from said space;
- said exhaust bores extending through said heat-treating plate from said upper surface to an opposite lower surface thereof;
- wherein said support devices include granular objects, and a coating layer covering said granular objects, said granular objects and said coating layer being formed of heat-resistant resin, and said coating layer bulging higher in positions where the granular objects are arranged than portions with no granular objects, to contact and support the substrate;
- said heat-treating plate having a heating element mounted therein;
- said heat-treating plate having a metallic heat transfer portion disposed between said heating element and said upper surface of said heat-treating plate.
6 more elements
A substrate heat treatment apparatus for heat-treating a substrate, comprising:
- a heat-treating plate formed of metal and having a flat upper surface;
- support devices disposed above the upper surface of said heat-treating plate for contacting and supporting the substrate;
- wherein said support devices are projections formed on a sheet member for contacting the substrate;
- said sheet member being formed of a heat-resistant resin and covering said flat upper surface of said heat-treating plate, comprising a structure formed entirely of a heat-resistant resin, for providing thermal conduction from said heat-treating plate to said substrate that is limited by a thermal conductivity of said heat-resistant resin;
- a seal device disposed annularly on the upper surface of said heat-treating plate for contacting edges of the substrate to render gastight a space formed between the substrate and said heat-treating plate;
- and
- exhaust bores for exhausting gas from said space;
- said exhaust bores extending through said heat-treating plate from said upper surface to an opposite lower surface thereof;
- said heat-treating plate having a heating element mounted therein;
- said heat-treating plate having a metallic heat transfer portion disposed between said heating element and said upper surface of said heat-treating plate.
7 more elements
A substrate heat treatment apparatus for heat-treating a substrate, comprising:
- a heat-treating plate formed of metal and having a flat upper surface;
- support devices disposed above the upper surface of said heat-treating plate for contacting and supporting the substrate, comprising a structure formed entirely of a heat-resistant resin, for providing thermal conduction from said heat-treating plate to said substrate that is limited by a thermal conductivity of said heat-resistant resin;
- wherein said support devices include granular objects, and a coating layer covering said granular objects, said granular objects and said coating layer being formed of a heat-resistant resin, and said coating layer bulging higher in positions where the granular objects are arranged than portions with no granular objects, to contact and support the substrate;
- a seal device disposed annularly on the upper surface of said heat-treating plate for contacting edges of the substrate to render gastight a space formed between the substrate and said heat-treating plate;
- and
- exhaust bores for exhausting gas from said space;
- said exhaust bores extending through said heat-treating plate from said upper surface to an opposite lower surface thereof;
- said heat-treating plate having a heating element mounted therein;
- said heat-treating plate having a metallic heat transfer portion disposed between said heating element and said upper surface of said heat-treating plate.
6 more elements
A substrate heat treatment apparatus for heat-treating a substrate, comprising:
- a heat-treating plate formed of metal and having a flat upper surface;
- a support and seal member including a base covering said flat upper surface of said heat-treating plate, a plurality of projections on said base, and a ring-shaped ridge on said base;
- wherein said support and seal member is formed of resin;
- said plurality of projections contact the substrate;
- said ring-shaped ridge contacts edges of the substrate to render gastight a space formed between the substrate and said heat-treating plate;
- and
- said ring-shaped ridge is formed integral with said base and said plurality of projections;
- and
- exhaust bores for exhausting gas from said space;
- said exhaust bores extending through said heat-treating plate from said upper surface to an opposite lower surface thereof;
- said heat-treating plate having a heating element mounted therein;
- said heat-treating plate having a metallic heat transfer portion disposed between said heating element and said upper surface of said heat-treating plate.
9 more elements
Dependencies are inferred from the claim text.