Panel-level package fabrication of 3D active semiconductor and passive circuit components

A panel-level package technique for fabricating a plurality of small, three dimensional, active and small passive electronic component packages, comprising the steps of:

• a) placing a regular, initial array of a larger perimeter planar electronic component having coplanar terminals on a temporary adhesive film supported on a planar surface;
• b) immersing the initial array of the larger components in a liquid phase, temporary bonding material;
• c) curing the temporary bonding material for creating a base panel layer encapsulating and securing the initial array of the larger perimeter planar components;
• d) removing a top layer of the cured, temporary bonding material from the base panel layer to expose top faces of, and any coplanar terminals presented on the top faces of the initial array of the larger perimeter planar electronic component;
• e) placing and attaching a second smaller perimeter, planar component presenting coplanar terminals on each exposed top face of the larger perimeter coplanar components encapsulated in the base panel layer;
• f) encapsulating the second smaller perimeter planar components placed on and attached to the exposed faces of the array of the larger perimeter planar components in the base panel layer within a layer of permanent, electrically insulating, bonding material;
• g) curing the layer of permanent, electrically insulating, bonding material creating a second panel layer of a regular array of the second smaller perimeter, planar components bonded to the regular array of the larger perimeter planar components held in the cured, temporary bonding material of the base panel layer;
• h) ablating via passages to each terminal of the larger component in the base panel on the top face of the base panel layer outside the perimeter of each attached second smaller perimeter planar component extending upward to an elevation above any coplanar terminals on top faces of the array of attached second smaller perimeter planar component;
• i) depositing solder paste into each terminal via passage of the larger component in the base panel exposed on the top face of the base panel layer outside the perimeter of each attached second smaller perimeter planar component extending upward to an elevation above any coplanar terminals on top faces of the array of attached second smaller perimeter planar component;
• j) heating the base and second panel layers for reflowing the solder paste pillars for establishing electrical metallurgical solder via connections to the exposed terminals of the first perimeter planar component on the top surface of the base panel layer of temporary bonding material;
• k) removing a top layer of the cured, second panel layer of permanent, electrically insulating, bonding material for (A) establishing a perimeter planar top surface, (B) exposing coplanar end faces of the solder via connections electrically connected to the terminals on the top faces of the larger perimeter planar components, and (C) exposing any terminal faces presented on the top surface of the second smaller perimeter planar component forming a regular array of small, three-dimensional electronic component packages encapsulated in the permanent, electrically insulating, bonding material of the second panel layer bonded to the temporary bonding material of the base panel layer;
• l) ablating intersecting singulation channels through the second panel layer along each side of each small, three dimensional electronic component packages, penetrating down to the top surface of the base panel layer of temporary bonding material;
• m) lifting the base and second planer layers of encapsulated three dimensional electronic component packages from the supporting perimeter planar surface;
• n) removing the temporary adhesive film from a bottom surface of the base panel layer of temporary bonding material exposing bottom faces and any coplanar terminals on the bottom faces of the initial array of the larger perimeter planar components;
• and
• o) dissolving and removing the base panel layer of temporary bonding material for singulating the three dimensional, electronic component packages permanently bonded together by the permanent, electrically insulating, bonding material.

A panel-level package technique for fabricating a plurality of small, three dimensional, active and passive electronic component modules comprising the steps of:

• a) creating a regular array of larger face-area components consisting of either:
• (i) a small passive electrical circuit hexahedral component having flat opposite faces with coplanar terminals at opposing ends, or
• (ii) a small flat, active semiconductor die components presenting active terminal faces in a plane opposite a passive-back face,
• face down on a temporary adhesive film supported on a planar surface, for orienting the opposing faces of the larger face-area components in a common plane;
• b) encapsulating the regular array of the larger face-area components in a temporary bonding material supported on the planar surface;
• c) curing the first temporary bonding material creating a base panel layer of an array of the larger face-area components immersed and held in cured, temporary bonding material;
• d) removing a top layer of the cured, temporary bonding material of the base panel layer above the plane of the opposing faces of the ordered array of the larger face-area for exposing the plane opposing faces of the array of larger face-area components on a top surface of the base panel layer;
• e) attaching a the smaller face-area component of either (i) one of the small passive electrical circuit component, or (ii) one of the small flat, active semiconductor die components, on each exposed face of the array of larger face-area components on top surface of the base panel layer;
• f) encapsulating the array of the smaller face-area components attached to the faces of the array of the larger face-area components in the base panel layer in a layer of permanent, electrically insulating, bonding material;
• g) curing the second layer of permanent, electrically insulating, bonding material to create a second panel layer of an array of the smaller face-area components permanently bonded to the larger face-area components held in the cured, temporary bonding material of the base panel layer;
• h) removing an initial top layer of the cured, second panel layer of permanent, electrically insulating, bonding material extending down to an elevation proximate any terminals of the smaller face-area components;
• i) ablating an array of via passages through the cured, second layer of electrically insulating, permanent bonding material for exposing terminals of the larger face-area components in the base panel layer below the second panel layer and active terminal faces of the smaller face-area components covered by the cured, second layer of electrically insulating, permanent bonding material;
• j) depositing a pillar of solder paste filling each via passage ablated through the cured second layer of permanent, electrically insulating, bonding material to an elevation above each via passageway such that upon heating and reflow, solidified solder fills the via passages;
• k) heating the base and second panel layers for reflowing the solder pastes for establishing solder vias metallurgically bonded and electrically connected to each terminals of the larger and smaller face area components;
• l) removing a subsequent top layer of the cured, second panel layer of permanent, electrically insulating, bonding material along with top portions of the pillars of solidified solder filling the via passages establishing a planar top surface of a panel of a regular array of small, three dimensional active and passive electronic component modules bonded together by the second layer of permanent, electrically insulating, bonding material and held in the base panel layer of temporary bonding material;
• m) ablating intersecting singulation channels penetrating down to the top surface of the base panel layer of temporary bonding material;
• n) lifting the panel of a regular array of small three dimensional, active and passive electronic component modules from the supporting planar surface;
• o) removing the temporary adhesive film from a bottom surface of the base panel layer exposing the bottom faces of the regular array of the larger face-area components;
• p) dissolving and removing the base panel layer of temporary bonding material singulating the small, three dimensional active and passive electronic component modules in the panel of a regular array of small, three dimensional active and passive electronic component modules.