Laser processing method
AssigneeHamamatsu Photonics K.K.
InventorsHideki Shimoi, Keisuke Araki
Life of this patent
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Abstract
A laser processing method of converging a laser light into an object to be processed made of glass so as to form a modified region and etching the object along the modified region so as to form a through hole in the object comprises a browning step of discoloring at least a part of the object by browning; a laser light converging step of forming the modified region in the discolored part of the object by converging the laser light into the object after the browning step; and an etching step of etching the object after the laser light converging step so as to advance the etching selectively along the modified region and form the through hole.
Claims5
A laser processing method of converging a laser light into an object to be processed made of glass so as to form a modified region and etching the object along the modified region so as to form a through hole in the object, the method comprising:
- a browning step of discoloring at least a part of the object by browning;
- a laser light converging step of forming the modified region in a discolored part of the object by converging the laser light into the object after the browning step;
- and
- an etching step of etching the object after the laser light converging step so as to advance the etching selectively along the modified region and form the through hole.
Dependencies are inferred from the claim text.