Sonication cleaning system
AssigneeWD Media, LLC
InventorsChaoyuan C. Chen, Bing-Shiuan Chang
Life of this patent
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Abstract
A sonication cleaning system is provided. The sonication cleaning system includes a cleaning tank configured to contain a liquid and a flow control system configured to cause a gradient cross flow of the liquid through the cleaning tank. The system further includes a sonication generator configured to agitate the liquid in the cleaning tank and a controller configured to vary a power applied to the sonication generator to agitate the liquid in the cleaning tank based on an oscillation position of a workpiece within the cleaning tank.
Claims23
A sonication cleaning system comprising:
- a cleaning tank configured to contain a liquid;
- a flow control system configured to cause a gradient cross flow of the liquid through the cleaning tank such that a flow rate of the liquid in a first portion of the cleaning tank is different than a flow rate of the liquid in a second portion of the cleaning tank;
- a sonication generator configured to agitate the liquid in the cleaning tank;
- and
- a controller configured to vary a power applied to the sonication generator to agitate the liquid in the cleaning tank based on an oscillation position of a workpiece within the cleaning tank.
A sonication cleaning system comprising:
- a cleaning tank configured to contain a liquid;
- a workpiece holder configured to support a workpiece in the cleaning tank;
- an actuator configured to oscillate the workpiece holder between an upper portion and a lower portion of the cleaning tank;
- a flow control system configured to cause a gradient cross flow of the liquid through the cleaning tank, wherein a flow rate of the liquid in the upper portion of the cleaning tank is greater than a flow rate of the liquid in the lower portion of the cleaning tank;
- a sonication generator configured to agitate the liquid in the cleaning tank;
- and
- a controller configured to apply a first power to the sonication generator when the workpiece holder is in the upper portion and to apply a second power to the sonication generator when the workpiece holder is in the lower portion, wherein the second power is greater than the first power.
Dependencies are inferred from the claim text.