Micromachined piezoelectric x-axis gyroscope

A gyroscope, comprising:

• a drive frame;
• a substrate;
• anchor means connected to the substrate and disposed within the drive frame means;
• drive means for connecting the drive frame means to the anchor means, the drive means configured to cause the drive frame means to oscillate torsionally in a plane of the drive means, the drive means being further configured to constrain the drive frame means to rotate substantially in the plane of the drive means;
• proof mass means disposed around the drive means, the proof mass means configured for sense motions wherein the proof mass means bends in a sense plane in response to an applied angular rotation, the sense plane being substantially perpendicular to the plane of the drive means, the sense motions of the proof mass means being substantially decoupled from motions of the drive frame means;
• and
• sense means for connecting the drive means to the proof mass means, the sense motions of the proof mass means causing a piezoelectric charge in the sense means, wherein the sense means include tapered sense beams having a width that decreases with increasing distance from the anchor means.

A gyroscope, comprising:

• a central anchor;
• a proof mass disposed around the central anchor, the proof mass having a first end and a second end;
• a first drive beam connecting a first side of the central anchor to the first end of the proof mass;
• a second drive beam connecting a second side of the central anchor to the second end of the proof mass;
• a first pair of piezoelectric drive electrodes disposed on the first drive beam;
• a second pair of piezoelectric drive electrodes disposed on the second drive beam;
• a first piezoelectric sense electrode disposed on the first drive beam;
• and
• a second piezoelectric sense electrode disposed on the second drive beam,
• wherein the first pair and the second pair of piezoelectric drive electrodes are configured, via a differential piezoelectric drive, to cause the proof mass to oscillate torsionally in a plane of the drive beams, and
• wherein the proof mass is configured for sense motions wherein the proof mass bends in a sense plane in response to an applied angular rotation, the sense plane being substantially perpendicular to the plane of the drive beams, the sense motions of the proof mass causing a piezoelectric charge in the sense electrodes.