Fluidized bed reactor
AssigneeSiliconvalue LLC.
InventorsYunsub Jung, Keunho Kim, Yeokyun Yoon, Ted Kim, Yong Ki Park, Kyung Koo Yoon, Myung Hoi Koo
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Abstract
A fluidized bed reactor is disclosed. The fluidized bed reactor includes a head; a first body part connected with the head, located under the head, the first body part having a first reaction pipe provided therein; a second body part connected with the first body part, located under the first body part, the second body part having a second reaction pipe provided therein; and a bottom part connected with the second body part, located under the second body part, the bottom part having a flowing-gas supply nozzle, a reaction gas supply nozzle, a heater and an electrode assembled thereto.
Claims18
A fluidized bed reactor comprising:
- a head;
- a first body part connected with the head, located under the head, the first body part having a first reaction pipe provided therein;
- a second body part connected with the first body part, located under the first body part, the second body part having a second reaction pipe provided therein;
- and
- a bottom part connected with the second body part, located under the second body part, the bottom part having a flowing-gas supply nozzle, a reaction gas supply nozzle, a heater and an electrode assembled thereto,
- wherein the heater is covered by a heater cap.
A fluidized bed reactor comprising:
- a head;
- a body part connected with the head, located under the head;
- a bottom part connected with the body part, located under the body part;
- and
- a heater coupled to the bottom part to supply heat that is used for generating silicon deposition reaction,
- wherein the bottom part comprises a lower plate having a flowing-gas supply nozzle, a reaction gas supply nozzle assembled thereto;
- a first plate provided on the lower plate, to insulate the lower plate;
- a second plate provided on the first plate, to supply electricity to the heater;
- and a third plate provided on the second plate, to insulate the second plate,
- wherein the second plate has a relatively large sectional area where electric current flows compared with a sectional area of the heater where current flows.
A fluidized bed reactor comprising:
- a head;
- a first body part connected with the head, located under the head, the first body part having a first reaction pipe, with a diameter smaller than a diameter of the head, provided therein;
- a second body part connected with the first body part, located under the first body part, the second body part having a second reaction pipe, with a diameter substantially identical to the diameter of the first reaction pipe, provided therein;
- a bottom part connected with the second body part, in which includes a lower plate, a first plate, a second plate and a third plate, which are layered sequentially;
- and
- a heater coupled to the bottom part to supply heat that is used for generating silicon deposition reaction,
- wherein the first body part and the second body part are able to be assembled to or disassemble from each other and the second plate includes a plurality of unit-plates so that the heater is contact with neighboring ones of the plurality of unit-plates of the second plate and is assembled thereto.
Dependencies are inferred from the claim text.