Methods and apparatus for automated predictive design space estimation
AssigneeMKS Instruments, Inc.
InventorsErnst Conny Vikström, Rafael Johannes Björk, Patrik Rydén
Life of this patent
Estimating the term…
Abstract
Described are computer-implemented methods and apparatuses, including computer program products, for estimating an optimal value for each input factor of a design space. The design space is defined by the input factors and output responses for a physical process. The optimal values for the input factors represent a starting point for estimating the design space. Data is received for the input factors, the output responses and criteria. An initial design space is estimated based on the received data. The optimal values for the input factors are determined from the initial design space.
Claims15
A computerized method for estimating an optimal value for each of a plurality of input factors of a design space, the design space being defined by the plurality of input factors and a plurality of output responses for a physical process, wherein the optimal values represent a starting point for estimating the design space, the computerized method comprising:
- receiving, via a computing device, the plurality of input factors, the plurality of output responses and criteria comprising a target response criterion for each of the plurality of output response;
- estimating, by the computing device, an initial design space, comprising:
- creating, by the computing device, a multidimensional grid, each dimension of the grid corresponding to an input factor, wherein the grid comprises a plurality of grid points, each grid point representing a set of values, each value being assigned to one input factor in the plurality of input factors;
- estimating, by the computing device, at each grid point a risk of failure level associate with each output response based on the target response criterion for the output response;
- and
- creating, by the computing device, the initial design space by aggregating the grid points at which the corresponding risk of failure levels are below a predetermined threshold;
- and
- determining, by the computing device, the optimal values for the plurality of input factors within the initial design space by successively eliminating one or more of the grid points in the initial design space closest to the boundary of the initial design space until at least one grid point remains, wherein the at least one grid point remaining represents the optimal values for the plurality of input factors.
A computer program product for estimating an optimal value for each of a plurality of input factors of a design space, the computer program product, tangibly embodied in a non-transitory machine-readable storage device and including instructions being operable to cause a data processing apparatus to:
- receive a plurality of input factors, a plurality of output responses and criteria comprising a target response criterion for each of the plurality of output responses;
- estimate an initial design space, comprising:
- creating a multidimensional grid, each dimension of the grid corresponding to an input factor, wherein the grid comprises a plurality of grid points, each grid point representing a set of values, each value being assigned to one input factor in the plurality of input factors;
- estimating at each grid point a risk of failure level associate with each output response in comparison to the target response criterion for the output response;
- and
- creating the initial design space by aggregating the grid points at which the corresponding risk of failure levels are below a pre-determined threshold;
- and
- determine the optimal values for the plurality of input factors within the initial design space by successively eliminating one or more of the grid points in the initial design space closest to the boundary of the initial design space until at least one grid point remains, wherein the at least one grid point remaining represents the optimal values for the plurality of input factors.
An apparatus for estimating an optimal value for each of a plurality of input factors of a design space, the design space being defined by the plurality of input factors and a plurality of output responses for a physical process, wherein the optimal values represent a starting point for estimating the design space, the apparatus comprising a processor configured to:
- receive the plurality of input factors, the plurality of output responses and criteria comprising a target response criterion for each of the plurality of output response;
- estimate an initial design space, comprising:
- creating a multidimensional grid, each dimension of the grid corresponding to an input factor, wherein the grid comprises a plurality of grid points, each grid point representing a set of values, each value being assigned to one input factor in the plurality of input factors;
- estimating at each grid point a risk of failure level associate with each output response in comparison to the target response criterion for the output response;
- and
- creating the initial design space by aggregating the grid points at which the corresponding risk of failure levels are below a pre-determined threshold;
- and
- determine the optimal values for the plurality of input factors within the initial design space by successively eliminating one or more of the grid points in the initial design space closest to the boundary of the initial design space until at least one grid point remains, wherein the at least one grid point remaining represents the optimal values for the plurality of input factors.
Dependencies are inferred from the claim text.