Method and apparatus for image generation

An image generation apparatus for an electronic device pattern using a plurality of divided pieces of images data obtained by an electron microscope, comprising:

• an image data memory medium which stores the plurality of divided pieces of the image data, wherein each image data has been obtained at a different imaging position and a part of the imaging positions are overlapped;
• and
• an image connection module configured to perform steps of:
• performing a first matching processing for aligning between the plurality of divided pieces of image data and layout information of design data;
• performing a second matching processing for aligning between adjacent pieces of the divided pieces of image data for which the first matching processing has been performed;
• and
• connecting the plurality of divided pieces of image to generate one image based on a result of the second matching processing.

An image generation apparatus for an electronic device pattern using a plurality of images obtained by an electron microscope, comprising:

• an electron microscope having a sample stage, a deflector which deflects an irradiation position of an electron beam, and a controller which controls the sample stage and the deflector;
• a design data storing medium which stores design data describing layout information of an electronic device pattern;
• an image data memory medium which stores the plurality of images, wherein each image has been obtained at different imaging positions and a part of the imaging positions are overlapped;
• and,
• an image connection module configured to perform an alignment between the plurality of images and layout data based on design data to form a connected image based on the alignment result;
• wherein the image connection module determines a relative moving range between the layout data and the images, based on a difference between edges of the layout data included in an overlapped region of the images and edges of the images, and performs a matching processing within the determined relative moving range to connect the plurality of images at positions adjusted by the matching processing.

An image generation apparatus for an electronic device pattern using a plurality of images obtained by an electron microscope, comprising:

• an electron microscope having a sample stage, a deflector which deflects an irradiation position of an electron beam, and a controller which controls the sample stage and the deflector;
• a design data storing medium which stores design data describing layout information of an electronic device pattern;
• an image data memory medium which stores the plurality of images, wherein each image has been obtained at different imaging positions and a part of the imaging positions are overlapped;
• an image connection module configured to perform an alignment between the plurality of images and layout data of the design data to form a connected image based on the alignment result;
• and
• an imaging position changing module which determines whether an edge of pattern included in an overlapping region of the images has line segments in at least two directions and generates a control signal for the sample stage and/or deflector so that the edge of the pattern included in the overlapping region includes the line segments in the at least two directions.