Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatus
AssigneeNikon Corporation
InventorJin Nishikawa
Life of this patent
Estimating the term…
Abstract
There is provided is an optical member-holding apparatus which can hold a plurality of optical members of two different optical systems, even when the optical members exist in a common barrel in a mixed manner, such that the relative positions between the optical members can be easily adjusted; and which holds a mirror in a projection optical system and a mirror in an illumination optical system and includes a barrel unit, an inner ring holding the mirror, a holding member holding the mirror, a support plate attached to the barrel unit, and a holding-supporting mechanism attached to the support plate and adjusting the relative position of the mirror to the mirror.
Claims27
An optical member-holding apparatus which holds a plurality of optical members in a barrel, comprising:
- a first holding portion configured to hold a first optical member, of the plurality of optical members, which guides a light beam to a mask formed with a pattern;
- a second holding portion configured to hold a second optical member, of the plurality of optical members, into which the light beam is incident via the mask;
- a support base which is attached to the barrel and which supports the first holding portion and the second holding portion;
- an adjusting mechanism which is attached to the support base and which adjusts a relative position of the first holding portion to the second holding portion;
- and
- a position adjusting member which adjusts a position of the support base relative to the barrel;
- wherein after the position adjusting member has adjusted the position of the support base relative to the barrel, the adjusting mechanism adjusts the relative position of the first holding portion to the second holding portion.
An optical member-holding apparatus comprising:
- a first holding portion which holds a first optical member among a plurality of optical members constructing a first optical system;
- a second holding portion which holds a second optical member among a plurality of optical members constructing a second optical system different from the first optical system;
- a third holding portion which holds a third optical member among the plurality of optical members constructing the second optical system;
- a first barrel unit which accommodates the first optical member via the first holding portion which accommodates the second optical member via the second holding portion;
- a second barrel unit which accommodates the third optical member via the third holding portion;
- a position adjusting member which is disposed between the first barrel unit and the second barrel unit and which adjusts a relative position of the third optical member to the first optical member;
- and
- an adjusting mechanism which adjusts a relative position of the first optical member to the second optical member after the position adjusting member has adjusted the relative position of the third optical member to the first optical member.
A position-adjusting method for adjusting relative positions of a plurality of optical members, the method comprising:
- adjusting a position of a support base relative to a barrel, the support base supporting a first optical member, among the plurality of optical members, which guides a light beam to a mask formed with a pattern and a second optical member, among the plurality of optical members, into which the light beam is incident via the mask;
- and
- adjusting a position of the first optical member depending on a position of the second optical member on the support base, after the position of the support base has been adjusted relative to the barrel.
A position-adjusting method for adjusting positions of optical members, the method comprising:
- accommodating, in a first barrel unit, a first optical member included in a plurality of optical members constructing a first optical system, and a second optical member included in a plurality of optical members constructing a second optical system different from the first optical system;
- accommodating, in a second barrel unit, a third optical member included in the plurality of optical members constructing the second optical system;
- adjusting a position of the third optical member relative to the first optical member by adjusting a relative position of the second barrel unit to the first barrel unit;
- and
- adjusting a relative position of the first optical member to the second optical member after adjusting the position of the third optical member relative to the first optical member.
Dependencies are inferred from the claim text.