Display device and manufacturing method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorHajime Kimura
Life of this patent
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Abstract
It is an object of the present invention to form a pixel electrode and a metal film using one resist mask in manufacturing a stacked structure by forming the metal film over the pixel electrode. A conductive film to be a pixel electrode and a metal film are stacked. A resist pattern having a thick region and a region thinner than the thick region is formed over the metal film using an exposure mask having a semi light-transmitting portion. The pixel electrode, and the metal film formed over part of the pixel electrode to be in contact therewith are formed using the resist pattern. Accordingly, a pixel electrode and a metal film can be formed using one resist mask.
Claims17
A display device comprising:
- a gate electrode over a substrate;
- a gate insulating film over the gate electrode;
- an island-like semiconductor film over the gate insulating film;
- a conductive layer over the island-like semiconductor film, the conductive layer being electrically connected to the island-like semiconductor film;
- a transparent conductive film over the gate insulating film;
- and
- a metal film over and in contact with the transparent conductive film, the metal film being electrically connected to the conductive layer,
- wherein the transparent conductive film comprises a portion whose thickness is smaller than a thickness of a portion which is in contact with the metal film, and
- wherein the transparent conductive film is a pixel electrode of a fringe field switching mode liquid crystal display device.
A display device comprising:
- a gate electrode over a substrate;
- a gate insulating film over the gate electrode;
- an island-like semiconductor film over the gate insulating film;
- a conductive layer over the island-like semiconductor film, the conductive layer being electrically connected to the island-like semiconductor film;
- a transparent conductive film over the gate insulating film;
- and
- a metal film over and in contact with the transparent conductive film, the metal film being electrically connected to the conductive layer,
- wherein the transparent conductive film comprises a portion whose thickness is smaller than a thickness of a portion which is in contact with the metal film.
A display device comprising:
- a gate electrode over a substrate;
- a gate insulating film over the gate electrode;
- an island-like semiconductor film over the gate insulating film;
- a conductive layer over the island-like semiconductor film, the conductive layer being electrically connected to the island-like semiconductor film;
- a transparent conductive film over the gate insulating film;
- and
- a metal film over and in contact with the transparent conductive film, the metal film being electrically connected to the conductive layer,
- wherein the transparent conductive film comprises a portion whose thickness is smaller than a thickness of a portion which is in contact with the metal film, and
- wherein the transparent conductive film and the metal film each have a different taper angle.
Dependencies are inferred from the claim text.