Interferometric optical modulator with broadband reflection characteristics
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorGang Xu
Life of this patent
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Abstract
An optical device suitable for forming a pixel in a video display. The optical device includes a first layer having a first refractive index; a second layer over the first layer, the second layer having a second refractive index less than the first refractive index; and a third layer over the second layer, the third layer having a third refractive index larger than the second refractive index; and a fourth layer that is at least partially optically absorptive, wherein the optical stack and the fourth layer are a first distance from one another when the device is in a first state and are a second distance from one another when the device is in a second state, the first distance different from the second distance.
Claims35
An optical device comprising:
- an optical stack including
- a first layer having a first refractive index;
- a second layer over the first layer, the second layer having a second refractive index less than the first refractive index;
- and
- a third layer over the second layer, the third layer having a third refractive index larger than the second refractive index;
- and
- a fourth layer that is at least partially optically absorptive,
- wherein the optical stack and the fourth layer are a first distance from one another when the device is in a first state, the optical device reflecting substantially white light while in the first state, and are a second distance from one another when the device is in a second state, the first distance different from the second distance.
A method of forming an optical device, comprising:
- forming a first layer, the first layer having a first refractive index;
- forming a second layer over the first layer, the second layer having a second refractive index less than the first refractive index;
- forming a third layer over the second layer, the third layer having a third refractive index larger than the second refractive index;
- forming a sacrificial layer over the third layer;
- forming a fourth layer that is at least partially optically absorptive over the sacrificial layer;
- and
- removing the sacrificial layer,
- wherein the optical device reflects substantially white light when the fourth layer is spaced apart from the third layer.
An optical device comprising:
- first means for reflecting and transmitting light, the first means having a first refractive index;
- second means for reflecting and transmitting light, the second means over the first means, the second means having a second refractive index less than the first refractive index;
- and
- third means for reflecting and transmitting light, the third means over the second means, the third means having a third refractive index larger than the second refractive index;
- and
- fourth means for reflecting and absorbing light, wherein the third means and the fourth means are a first distance from one another when the device is in a first state, the optical device reflecting substantially white light while in the first state, and are a second distance from one another when the device is in a second state, the first distance different from the second distance.
Dependencies are inferred from the claim text.