MEMS switching array having a substrate arranged to conduct switching current

A micro-electromechanical systems (MEMS) switch array comprising:

• a first electrically conductive substrate without via structures being disposed in the electrically conductive substrate, the electrically conductive substrate shared by at least some of the MEMS switch array;
• an electrical isolation layer having a first surface disposed over a first surface of the first substrate;
• a plurality of movable actuators disposed proximate a second surface of the electrical isolation layer opposite the first surface of the electrical isolation layer;
• at least one substrate contact electrically coupled to at least one of the plurality of movable actuators and passing through the electrical isolation layer to be electrically coupled to the electrically conductive substrate so that a flow of electrical current being switched is established during an electrically-closed condition of the MEMS switch array, wherein said at least electrically conductive substrate of the first substrate defines an electrically conductive path for the flow of electrical current.

A micro-electromechanical systems (MEMS) switch array comprising:

• an electrically conductive carrier substrate without via structures being disposed in the carrier substrate, the electrically conductive substrate shared by at least some of the MEMS switch array;
• an electrical isolation layer having a first surface disposed over a first surface of the carrier substrate;
• a plurality of movable actuators disposed proximate a second surface of the electrical isolation layer opposite the first surface of the electrical isolation layer;
• at least one substrate contact electrically coupled to at least one of the plurality of movable actuators and passing through the electrical isolation layer to be electrically coupled to the carrier substrate so that a flow of electrical current being switched is established during an electrically-closed condition of the MEMS switch array;
• and
• an electrically conductive cover substrate without via structures being disposed in the cover substrate, wherein the carrier substrate is electrically coupled by way of an interface contact to the cover substrate to define an electrically conductive path for the flow of electrical current during the electrically-closed condition of the switching array.

A MEMS device comprising:

• substrate supporting a MEMS switch, the substrate being formed of an electrically conductive material;
• an electrically conductive path comprising an input end and an output end selectively interconnected by switch, the input and output ends of the electrically conductive path being disposed on opposed sides of the electrically conductive substrate, so that current conducted by the switch between the input and output ends of the electrically conductive path passes through a thickness of the electrically conductive substrate;
• a layer of insulating material disposed on a surface of the electrically conductive material;
• a conductive anchor disposed on the layer of insulating material;
• an actuator connected to the conductive anchor;
• and
• a conductive substrate contact passing through the layer of insulating material and making contact with the substrate;
• wherein the actuator is selectively movable into and out of contact with the conductive substrate contact to selectively connect and disconnect the input and output ends of the electrically conductive path.