Microelectromechanical resonators with passive frequency tuning using built-in piezoelectric-based varactors
AssigneeIntegrated Device Technology, Inc.
InventorsHarmeet Bhugra, Ashwin Samarao
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Abstract
Microelectromechanical resonators include a resonator body with a built-in piezoelectric-based varactor diode. This built-in varactor diode supports passive frequency tuning by enabling low-power manipulation of the stiffness of a piezoelectric layer, in response to controlling charge build-up therein at resonance. A resonator may include a composite stack of a bottom electrode, a piezoelectric layer on the bottom electrode and at least one top electrode on the piezoelectric layer. The piezoelectric layer includes a built-in varactor diode, which is defined by at least two regions having different concentrations of electrically active dopants therein.
Claims20
A microelectromechanical resonator, comprising:
- a resonator body comprising a composite stack of a bottom electrode, a piezoelectric layer on said bottom electrode and at least one top electrode on said piezoelectric layer, said piezoelectric layer comprising a built-in varactor diode defined by at least two regions in said piezoelectric layer having different concentrations of electrically active dopants therein.
A periodic signal generator, comprising:
- a resonator body including a composite stack of a semiconductor layer anchored by at least a pair of tethers to a surrounding substrate, a bottom electrode on the semiconductor layer, a piezoelectric layer on the bottom electrode and at least one sense electrode and at least one drive electrode on the piezoelectric layer, said piezoelectric layer comprising a built-in varactor diode defined by at least two regions in said piezoelectric layer having different concentrations of electrically active dopants therein;
- and
- a DC reference voltage generator electrically coupled to one of the sense electrode and drive electrode.
Dependencies are inferred from the claim text.