Backside illuminated semiconductor light-receiving device, optical receiver module, and optical transceiver

A backside illuminated semiconductor light-receiving device comprising:

• a rectangular semiconductor substrate;
• a mesa-shaped light receiving portion having a PN junction portion which receives light incident from a back surface of the semiconductor substrate, the light receiving portion being formed on a center portion of one side on a front surface of the semiconductor substrate and at a position where a distance from the one side to the light receiving portion is set shorter than ½ of a length of two other sides adjacent to the one side;
• an electrode of a first conductive type which is formed on an upper surface of the light receiving portion and is conductive with one side of the PN junction portion;
• a main mesa portion which is formed on one corner portion of the one side on the front surface of the semiconductor substrate, and has an upper surface wider than the upper surface of the light receiving portion;
• an electrode of a second conductive type which is pulled out to the upper surface of the main mesa portion and is conductive with the other side of the PN junction portion;
• one or a plurality of sub mesa portions which are formed in a region which includes three other corner portions on the front surface of the semiconductor substrate and have upper surfaces wider than the upper surface of the light receiving portion;
• and
• an electrode formed on the upper surface of each sub mesa portion.