Lateral-diffusion metal-oxide semiconductor device
AssigneeUnited Microelectronics Corp.
InventorsTseng-Hsun Liu, Chiu-Ling Lee, Zheng-Hong Chen, Yi-Ming Wang, Ching-Ming Lee
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Abstract
A method for fabricating a lateral-diffusion metal-oxide semiconductor (LDMOS) device is disclosed. The method includes the steps of: providing a semiconductor substrate; forming a first region and a second region both having a first conductive type in the semiconductor substrate, wherein the first region not contacting the second region; and performing a thermal process to diffuse the dopants within the first region and the second region into the semiconductor substrate to form a deep well, wherein the doping concentration of the deep well is less than the doping concentration of the first region and the second region.
Claims9
A lateral-diffusion metal-oxide semiconductor (LDMOS) device, comprising:
- a semiconductor substrate;
- at least one gate structure disposed on surface of the semiconductor substrate;
- a first well having a first conductive type, disposed in the semiconductor substrate adjacent to one side of the gate structure;
- a first isolation structure disposed in an upper portion of the first well and under a portion of the gate structure;
- a drain region disposed in the first well;
- a second isolation structure disposed in the semiconductor substrate adjacent to another side of the gate structure;
- a second well having a second conductive type, disposed in the semiconductor substrate between the second isolation structure and the gate structure;
- a source region disposed in the second well;
- and
- a deep well having the first conductive type disposed in the semiconductor substrate, wherein the deep well comprises a first region having the first conductive type and a second region having the first conductive type, the doping concentration of the first region is substantially the same as the doping concentration of the second region, wherein the first region is disposed under the first isolation structure and the first well, and wherein the second region is disposed under the second isolation structure and a portion of the second well, and the doping concentration of the deep well is less than the doping concentration of the first region and the second region.
Dependencies are inferred from the claim text.