Post-fabrication self-aligned initialization of integrated devices
AssigneeInternational Business Machines Corporation
InventorsMichele M. Franceschini, John P. Karidis
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Abstract
Creating a localized region of material having a target chemical composition by defining an electrical circuit on a substrate, and depositing on the electrical circuit one or more layers of materials having one or more chemical compositions. An electrical current pulse is applied to the electrical circuit to create a self-aligned localized region having the target chemical composition. Applying the electrical current pulse causes a portion of the one or more layers of materials to be heated, resulting in the target chemical composition.
Claims6
A method of creating a localized region of material having a target chemical composition, the method comprising:
- defining an electrical circuit on a substrate;
- depositing one or more layers of materials having one or more chemical compositions, the depositing on the electrical circuit;
- and
- applying an electrical current pulse to the electrical circuit to create a self-aligned localized region having the target chemical composition, the applying an electrical current pulse causing a portion of the one or more layers of materials to be heated resulting in the target chemical composition;
- wherein the one or more layers of materials include a topmost layer that is a chemical resist, and the self-aligned localized region defines a region for sensitizing the chemical resist, the sensitizing occurring in response to an increase in temperature.
Dependencies are inferred from the claim text.