Back to results
US 8,575,003 B2Granted
Method for producing a semiconductor component
AssigneeOSRAM Opto Semiconductors GmbH
InventorsMichael Fehrer, Berthold Hahn, Volker Härle, Stephan Kaiser, Frank Otte, Andreas Plössl
Life of this patent
Estimating the term…
Abstract
Presented is a method for producing an optoelectronic component. The method includes separating a semiconductor layer based on a III-V-compound semiconductor material from a substrate by irradiation with a laser beam having a plateau-like spatial beam profile, where individual regions of the semiconductor layer are irradiated successively.
Claims43
A method for producing an optoelectronic component, comprising:
- separating a semiconductor layer based on a III-V-compound semiconductor material from a substrate by irradiation with a laser beam having a plateau-like spatial beam profile;
- wherein a plurality of individual regions of the semiconductor layer are irradiated successively such that each region of the plurality of individual regions of the semiconductor layer is radiated in a single radiation step and said plurality of individual regions are arranged in a matrix,
- wherein the individual regions have approximately a rectangular shape and the laser beam profile has a substantially plateau-shaped central region corresponding to a dimension of the rectangular shape of the individual regions.
A method for producing an optoelectronic component, comprising:
- separating a semiconductor layer based on a III-V-compound semiconductor material from a substrate by irradiation with a laser beam having a plateau-like spatial beam profile;
- wherein a plurality of individual regions of the semiconductor layer are irradiated successively such that each region of the plurality of individual regions of the semiconductor layer is radiated in a single radiation step and said plurality of individual regions are arranged in a matrix,
- wherein rows of the matrix of said plurality of individual regions are offset with respect to each other.
Dependencies are inferred from the claim text.