Method of fabricating a lateral double-diffused MOSFET (LDMOS) transistor and a conventional CMOS transistor

A method of fabricating an LDMOS transistor and a conventional CMOS transistor together on a substrate, the method comprising:

• forming a gate for the LDMOS transistor, including forming an LDMOS gate oxide and covering the LDMOS gate oxide with a conductive material;
• after forming the gate for the LDMOS transistor, forming a gate for a CMOS transistor, including forming a gate oxide of the CMOS transistor and covering the gate oxide of the CMOS transistor with a conductive material, wherein the gate of the CMOS transistor is formed distinct from the gate for the LDMOS transistor;
• forming a P-body in a source region of the LDMOS transistor, including
• performing a first p-type implant after forming the LDMOS gate oxide and before forming the gate for the CMOS transistor,
• performing a second p-type implant after performing the first p-type implant, the second p-type implant having lower energy and smaller tilt angle;
• and
• performing a rapid thermal anneal of the LDMOS transistor and CMOS transistor after the second p-type implant.