Method for fabricating array-molded package-on-package
AssigneeTexas Instruments Incorporated
InventorsMark A. Gerber, David N. Walter
Life of this patent
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Abstract
An improved semiconductor device package is manufactured by attaching semiconductor chips (130) on an insulating substrate (101) having contact pads (103). A mold is provided, which has a top portion (210) with metal protrusions (202) at locations matching the pad locations. The protrusions are shaped as truncated cones. The substrate and the chips are loaded onto the bottom mold portion (310); the mold is closed by clamping the top portion onto the bottom portion so that the protrusions approach the contact pads. Encapsulation compound is introduced into the cavity and the protrusions create apertures through the encapsulation compound towards the pad locations.
Claims9
A method for fabricating a semiconductor device, said method comprising:
- providing a mold having
- a top portion and
- a bottom portion,
- the top portion including
- recesses suitable for a cavity and
- a plurality of protrusions shaped as truncated cones;
- placing a thin sheet of compliant inert polymer over the surface of the top portion;
- introducing a molding compound into the cavity to form a encapsulation body
- covering
- a semiconductor chip and
- linear arrays of contact pads adjacent to the chip, each conical protrusion matching a contact pad location,
- leaving a conical aperture in the encapsulation body over each contact pad corresponding to a conical protrusion in the cavity;
- and
- after partial polymerizing of the molding compound,
- the mold is opened and
- the encapsulated semiconductor chip is removed;
- wherein the thin sheet of compliant inert polymer is dissolved into the molding compound.
The method of 2, in which the molding compound covers a first surface of the substrate on which the semiconductor chip is disposed and does not cover a second surface opposite the first surface.
Dependencies are inferred from the claim text.