Method of forming silicon nanowires and method of fabricating lithium secondary battery using the same
AssigneeUnist Academy-Industry Research Corporation
InventorsSoojin Park, Byoungman Bang, Jung-Pil Lee, Hyun-Kon Song, Jaephil Cho
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Abstract
A method of preparing a silicon nanowire and a method of fabricating a lithium secondary battery including the silicon nanowire are provided. The method of preparing a silicon nanowire may include forming a catalyst layer including metal particles separated from one another on a silicon layer, selectively etching the silicon layer contacting the metal particles, and removing the metal particles.
Claims13
A method of preparing a silicon nanowire, comprising:
- forming a catalyst layer comprising metal particles separated from one another on a silicon material;
- selectively etching the silicon material contacting the metal particles;
- and
- removing the metal particles,
- wherein the forming of a catalyst layer comprises:
- forming mask particles with a material different from the metal particles and the silicon material;
- and
- forming the metal particles among the mask particles.
A method of fabricating a lithium secondary battery, comprising:
- forming a silicon material on a current collector layer;
- forming a catalyst layer comprising metal particles arranged at a predetermined distance on the silicon material which is formed on the current collector layer;
- etching the silicon material using the metal particles as a catalyst to form silicon nanowires;
- and
- removing the metal particles.
A method of fabricating a lithium secondary battery, comprising:
- forming a catalyst layer comprising metal particles arranged at a predetermined distance on silicon material;
- etching the silicon material using the metal particles as a catalyst to form silicon nanowires;
- removing the metal particles;
- and,
- coating the silicon nanowires with carbon.
Dependencies are inferred from the claim text.