OVJP patterning of electronic devices
AssigneeThe Regents of the University of Michigan
InventorsStephen Forrest, Gregory McGraw
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Abstract
A method for forming an electronic device such as a passive color OLED display. Bottom electrodes are patterned onto a substrate in rows. Raised posts formed by photoresist are patterned into columns oriented orthogonally to the bottom row electrodes. One or more organic layers, such as R, G, B organic emissive layers are patterned over the raised posts and bottom electrodes using organic vapor jet printing (OVJP). An upper electrode layer is applied over the entire device and forms electrically isolated columnar electrodes due to discontinuities in the upper electrode layer created by the raised columnar posts. This permits patterning of the upper electrodes over the organic layers without using photolithography. A device formed by this method is also described.
Claims11
A method of forming an electronic device using organic vapor jet printing, comprising the steps of:
- (a) patterning onto a substrate a plurality of bottom electrodes that are electrically isolated from each other;
- (b) patterning a plurality of raised posts that each extend across at least some of the bottom electrodes, wherein the plurality of raised posts define upper electrode channels between adjacent pairs of the raised posts;
- (c) applying rows of an organic material over at least portions of the bottom electrodes using directed stream printing so that the rows cross at least some of the raised posts;
- and
- (d) applying a layer of electrode material over the raised posts and into the upper electrode channels, wherein the raised posts create discontinuities in the layer of electrode material, thereby creating isolated upper electrodes in each of the electrode channels.
A method of forming an electronic device using organic vapor jet printing, comprising the steps of:
- (a) patterning onto a substrate a plurality of bottom electrodes that are electrically isolated from each other;
- (b) patterning a plurality of raised posts that each extend across at least some of the bottom electrodes, wherein the plurality of raised posts define upper electrode channels between adjacent pairs of the raised posts;
- (c) applying an organic material over at least portions of the bottom electrodes using directed stream printing;
- and
- (d) applying a layer of electrode material over the raised posts and into the upper electrode channels, wherein the raised posts create discontinuities in the layer of electrode material, thereby creating isolated upper electrodes in each of the electrode channels;
- wherein step (a) comprises patterning the plurality of bottom electrodes onto the substrate in rows using photolithography;
- wherein step (b) comprises forming the raised posts using photolithography by patterning columns of a photoresist oriented orthogonally to the rows of bottom electrodes;
- and
- wherein step (c) comprises applying rows of organic material using organic vapor jet printing such that the rows of organic material overlie the bottom electrodes and cross the raised posts, wherein the raised posts create discontinuities in the rows of organic material that define electrically isolated subpixel sites of organic material.
Dependencies are inferred from the claim text.