Deposition donor substrate and method for manufacturing light-emitting device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsSatoshi Seo, Kohei Yokoyama
Life of this patent
Estimating the term…
Abstract
One surface of a first substrate provided with at least light-absorbing layers separately formed, partition layers each formed between the light-absorbing layers and having an inverse taper shape, and material layers formed on the light-absorbing layers and on the partition layers so that the material layers are separated from each other is disposed to face a deposition target surface of a second substrate; light irradiation is performed from the other surface of the first substrate, only the material layers in regions overlapped with the light-absorbing layers are heated and evaporated to the deposition target surface of the second substrate.
Claims33
A deposition donor substrate comprising:
- light-absorbing layers on a substrate;
- partition layers on the substrate and each between the light-absorbing layers;
- and
- material layers on the light-absorbing layers and on the partition layers so that the material layers are separated from each other,
- wherein each of the light-absorbing layers are island shaped or stripe shaped.
A deposition donor substrate comprising:
- light-absorbing layers separated from each other on a substrate;
- partition layers on the substrate and each between the light-absorbing layers;
- and
- material layers on the light-absorbing layers and on the partition layers so that the material layers are separated from each other,
- wherein each of the light-absorbing layers are island shaped or stripe shaped, and
- wherein each of the partition layers has an inverse taper shape.
A deposition donor substrate comprising:
- light-absorbing layers separated from each other over a substrate;
- partition layers on the substrate and each between the light-absorbing layers;
- reflective layers on the light-absorbing layers and on the partition layers so that the reflective layers are separated from each other;
- and
- material layers separated from each other over the reflective layers,
- wherein each of the light-absorbing layers are island shaped or stripe shaped.
A deposition donor substrate comprising:
- a first partition layer and a second partition layer on a substrate;
- a light-absorbing layer on the substrate and between the first partition layer and the second partition layer;
- and
- a material layer on the light-absorbing layer,
- wherein each of the first partition layer and the second partition layer are island shaped or stripe shaped.
Dependencies are inferred from the claim text.